Abstract : the operation principle , construction design , preparation technologies and testing methods of the micro - silicon electrostatically force - balanced accelerometer with torsional pendulum are introduced . there is the certain reference value to develop a micro - silicon accelerometer 文摘:介绍了硅微型扭摆式静电力平衡加速度计的工作原理、结构设计、制备技术及测试方法，这对于研制硅微型加速度计具有一定的参考价值。
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